抄録
Patterned ceramic structures composed of two different materials with a feature resolution in the micrometer range have been generated by microfluidic lithography. Micro-channels made of poly(dimethylsiloxane) were filled with well-dispersed slurry of high solid loading followed by solidifying suspension upon solvent evaporation. The cross-inserted comb-type ceramic structures with 50 μm and 100 μm width were fabricated in a relatively large area of 2×2 cm2 for alumina dyed with red and blue colors. It was found that controls of suspension characteristics and its drying play an important role in determining of pattern quality. Micro-channel filling was significantly influenced by viscosity and surface tension of suspension and interfacial interaction of suspension with surfaces of the substrate and poly(dimethylsiloxane). Once filled, a proper drying condition must be met. Otherwise, the micro-channels were disconnected due to capillary stress, resulting in a poor pattern generation.
