Development of Centrifugal Sintering Equipment

抄録

Sintering of thick film and multi-stacked film have been possessed great interest to develop highly integrated functional devices. So far, an enhancement of sintering is mainly carried out by applying external pressure as seen in HP or HIP. However, those processes can not directly apply to the sintering of films from the industrial point of view. In this work, centrifugal sintering equipment was designed and produced. Furthermore, advantageous effects of centrifugal pressure on sintering were investigated by several examinations. We introduce new concept about centrifugal sintering method with high pressure and without pressure medium, and some experimental sintering data will be shown.