Room Temperature Processing of Titania Thin Films by CSD Method Combined with UV Irradiation

抄録

Recently the demand for the ceramic coating for optical devices has been increasing. In this work, the processing of titania thin films was investigated by chemical solution deposition method. In order to decrease the processing temperature on organic substrate such as PET, the UV treatment was developed instead of a common heating process. Titania thin film with a refractive index over 2.1 was successfully synthesized by this UV processing. The quality of the film was also characterized by XPS, which revealed that the spectrum of the amorphous film is almost the same as that of crystalline titania.