Abstract
In this paper, stainless steel (SS) was selected as substrate for PZT. TiO2 film was used as buffer layer and PbTiO3 film was subsequently deposited as a seeding layer. The PZT/PT/TiO2/SS material system was investigated for piezoelectric applications.The structure and morphology of the films were characterized by XRD and FESEM. The dielectric and ferroelectric properties of the films were measured. It was found that SS matched well with PZT and the crystallization temperature of PZT was decreased. The electrical properties of PZT/SS, PZT/TiO2/SS and PZT/PT/TiO2/SS were compared and the PZT/PT/TiO2/SS revealed better properties. The dielectric constant and dissipation factor of PZT/PT/TiO2/SS are about 230 and 0.05, respectively, with remanent polarization around 20μC/cm2 and coercive field around 50KV/cm. The measured piezoelectric constant (d33) of PZT/PT/TiO2/SS is about 25 pC/N. In summary, the heterostructure of PZT combined with stainless steel has good potential for use as embedded piezoelectric devices.
