Abstract
We have succeeded in developing the fabrication process of micro gas sensor array by utilizing self-assembly technique. SnO2 thin film, prepared by an aqueous solution process, was selected as the gas sensor material. The electrical characterization results and their sensing properties in the presence of hydrogen are recorded. The effect of the crystallized degree on the electrical and gas sensing properties was investigated. Tin oxide with cassiterite structure was deposited in the solution containing of SnCl2 ·2H2O at 60 °C in an ambient air. The patterned monolayer surface was used as template for the site-selective deposition of SnO2 thin films. The values of the gas sensitivity of increased with crystallized degrees in the films.
