Abstract
Carbon nanotube(CNT) sensors have high sensitivity and good response time compared with common oxide sensors due to the high surface area. In this experiment, to fabricate CNT sensor, CNT powder was dispersed in dimethylformamide solution. And the solution was put in the ultrasonic bath for 2 hours. The CNT sensor was fabricated by spraying the CNT dispersed solution on the mask. The spray coated CNT film was heat-treated at 200°C. The microstructure of CNT film was observed by SEM and TEM. After the CNT sensor was stabilized by N2 gas, sensitivity, response time and recovery rate were measured with NH3 and NO gases. This CNT sensor showed positive sensitivity of NH3 gas and negative sensitivity of NO gas.
