Abstract
Nanoindentation is an effective way for testing mechanical properties of materials in a nanometer scale. It was developed from hardness testing method, such as Rockwell, Brinnell, or Vickers, but had much more functions such as depth sensing or dynamic testing capabilities. However, since it is a new method, its reliability has not been fully tested or approved. In this presentation, several topics concerning reliability of this method will be discussed. First, calibration processes such as machine compliance, contact area, drift, and creep will be discussed. Second, nanoindentation data of various materials after calibration will be compared with those obtained from other method. Finally, various factors affecting the reliability such as size, roughness, pile-up, sink-in, and excursion behavior will be discussed based on FEM simulation, experimental data, and microstructure analysis.
