抄録
A strain evaluation technique using a micro focus X-ray beam was developed. An electron gun with two electron lenses was used in order to steadily make a fine focus of an electron beam on a copper target. The target current was 84 μA, and an X-ray brightness 52x109W/m2 was obtained. X-ray was condensed to a converging angle 0.09 deg with a convergent unit, and the minimum focus diameter was 60 μm. A direct beam intensity was 8.5x105 cps. The principal strain in a sapphire was measured. The maximum principal strain was in extremely good agreement with the estimated value. In the case of the second principal strain and the minimum principal strain, the error of the sample loaded more than 300 με was within 70 με. The diffraction patterns were able to be detected for a single grain in a translucent alumina.
