Abstract
Ceramic filter membranes with a mesoporous silica layer which has one-dimensional through channels perpendicular to the membrane surface were successfully fabricated by a novel processing. This process consists of two original techniques: eutectic decomposition of amorphous films and simultaneous chemical etching of the decomposed films and substrates. At first, bulk phase-separated glass disks (Vycol Glass) with one side polished surface were used as the substrates. Then, a precursor film that consisted of needle-like Fe2O3 nano-crystals and SiO2 matrix was formed on the polished surface of the substrate. Finally, the Fe2O3 crystals in the heated film and soluble parts in the glass substrate were removed by the chemical etching simultaneously, leaving behind the porous ceramic filter membrane. Gas permeation properties of the membrane were measured, but the permeability of the membrane is ten times smaller than that of the porous vycol glass etched without a precursor film.
