Abstract
I will talk about the concepts of ″ceramics integration″.For the development of the ceramics integration technology, the clarification of the relationship between functional properties of the hetero-structures and physical and chemical properties, i.e. composition, non-equilibrium defects, microstructures at the hetero-interface is indispensable. The purpose of this study is the exploring of the buffer layer between different crystal structures or different electronic structures, the development of micro patterning technology and composition analysis at the hetero-interface by secondary ion mass analysis method (SIMS) for new functional materials development.
