Nano-Particle Structures by Excimer Laser Irradiation in Er-Doped KNbO₃-TeO₂ Glasses

抄録

A novel periodic structure consisting of nanometer-scale particles in Er-doped KNbO₃-TeO₂ glass surface fabricated by phase mask technique has been reported, a part of challenges to nano-photonic circuits. Laser-architecture of nano-structures in TeO₂-based glasses has been performed by a use of XeCl excimer laser with 308 nm wavelength through the phase mask with 400 nm pitch. Nano-particle structures arranged in straight lines were confirmed by AFM and SEM observations. In addition, a large change of refractive index, Δn/n, induced by UV-irradiation have been found to be more than 10% decrease. Mechanism of laser-induced nano-structures, origin of Δn, and possible nano-crystallization will be discussed based on quantitative evaluation on optical and structural properties in Er-doped KNbO₃-TeO₂ glasses.