Piezoelectric property of PZT-PNN thick film determined by double beam laser-Doppler-velocimeter and finite element method

Abstract

Recently, piezoelectric thick films are extensively studied for the use in micro actuator applications due to their large piezoelectric displacement and generative force. In this study, we proposed a new method to determine the piezoelectric constant of thick films using a double-beam laser Doppler interferometer combined with the analysis with finite element method (FEM). PZT-PNN thick film was fabricated by an interfacial polymerization process on Si substrate. A brass plate with a hole of 1mm &phi was attached on the back of the substrate to restrict the vibration area of piezoelectric films. The vibrated behavior of this thick film measured with this system was the same as the model calculated by FEM. From the FEM analysis, piezoelectric and elastic constants of the thick film could be determined.