Abstract
The whiskers synthesized using a chemical-vapor deposition apparatus show the intense ultraviolet emission induced by electron impact. To evaluate the crystal growth process of ZnO, the relationship between morphology and intensity of the cathodoluminescence of the ZnO whiskers was examined. The ZnO whiskers and the ZnO polycrystalline films were provided for the experiment. The intensity of the ultraviolet emission of the ZnO whiskers was larger than that obtained from the ZnO films. This implies that the intensity of the cathodoluminescence increases, when crystal growvth changes from continuous film growth to whisker growth.