Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Preprints of Annual Meeting of The Ceramic Society of Japan, 2003
Session ID : 1B15
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Preparation and photoelectrochemical properties of TiO2 films by reactive helicon plasma sputtering method
*Dorjpalam EnkhtuvshinMasahide TakahashiToshinobu Yoko
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Abstract
Highly reduced TiO2 thin film in its rutile modification was prepared by means of helicon sputtering method without applying an additional reducing treatment. Photoelectrochemical (PEC) properties of such sputter deposited films are studied in comparison with that of sol-gel derived TiO2 films. Band model describing the observed PEC characteristics of the helicon plasma sputter deposited highly reduced TiO2 film is then proposed.
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© The Ceramic Society of Japan 2003
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