Effects of photoreactive additives on the crystallinity of alkoxy-derived zirconia thin films

Abstract

ZrO2 precursor solutions were prepared using a zirconium alkoxide (Zr(OnBu)4) and acetylacetone. The crystallinity of the 400°C-annealed ZrO2 thin films was enhanced by acetylacetone addition and UV irradiation using an ultra-high pressure mercury lamp. The effects of UV irradiation on the crystallinity of thin films have changed by amounts of acetylacetone. It was suggested that the orientation of polymerization, degrees of polymerization and the stability of non-crystalline thin films on UV irradiation have changed by amounts of acetylacetone.