Microstructures of YSZ films prepared by LASER-MOCVD

Abstract

We have succeeded in preparing YSZ films at high deposition rate of 660μm/h using newly developed laser MOCVD. In this study, effects of incident laser power (P_L) and substrate pre-heating temperature (T_pre) on deposition rates and microstructures were investigated. When P_L=200 W, YSZ films with a columnar structure were prepared at P_L from no pre-heating to 750°C. The deposition rate at P_L=200 W and P_L=550°C was 450μm/h and the YSZ film had a highly (200) oriented columnar structure.