Measurement of optical emission on laser MOCVD deposition process

Abstract

YSZ thin films were prepared by laser CVD. The deposition rates were significantly increased to 660μm/h by the assistance of laser irradiation. Particular light emission was observed during the laser CVD process. Negative and positive space charges were identified in the reaction zone, where the charges mainly consisted of ions. The emission spectra were continuous, and sharper than the Planck distribution. Intermediate clusters could be heated at around 4200K in the reaction zone.