Electro-luminecsence Property of YNbO4 Thin Film using ITO Thin Film as an Upper Electrode

Abstract

In this study, realizing blue-emitting from YNbO4 thin film is objective. For realizing it, deposition condition and substrate were optimized and ITO thin film as upper electrodes was used. YNbO4 thin films were deposited on Pt/lr02/Si02/Si(100) and SrTi03(100) by RF magnetron sputtering method. ITO (Indium-Tin oxide) thin films as upper electrode were deposited on YNbO4 thin film by PLD (Pulsed laser deposition) method. The electro luminescence (EL) in YNbO4 thin films was measured by the photonic multi-channel analyzer.