Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Preprints of Annual Meeting of The Ceramic Society of Japan, 2003
Session ID : 2K08
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Host: The Ceramic Society of Japan

Electric field induced resonance phenomena in the SrTiO3 thin film MIM capacitor at sub-mm band
*Kentaro Morito, Yoshiki Iwazaki, Kunihiko Nakajima, Toshimasa Suzuki, Masayuki Fujimoto
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Abstract
The influence of electric field induced ferroelectricity (piezoelectricity) in SrTiO3 thin films on the capacitance of the Pt/SrTiO3/Pt MIM capacitors were investigated. The SrTiO3 thin film MIM capacitors show electric field induced resonance under dc electric field at specific frequencies. These piezoelectric resonant frequencies depend only on the stack structure of the capacitor, but are independent of the MIM area and the applied dc electric field strength.
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© The Ceramic Society of Japan 2003
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