Photoluminescence of ZnO thin films prepared by rf magnetron sputtering

Abstract

Non-doped and rare-earth metal doped ZnO films with/without AlN buffer layer were fabricated on (0001) sapphire substrates by reactive rf magnetron sputtering. The films were investigated by measuring photoluminescence(PL), SEM and XRD. The PL spectra showed dominant UV emission at about 380 nm and the emissions from Eu.