Electrical Properties of PZT thin films with c-axis oriented seedeing layer by Electrical Field

Hisao Suzuki; Sigeru Suzuki; Yusuke Hosi; Hiroshi Nakayama; Masato Uehara; Junichi Hojo

doi:10.14853/pcersj.2003S.0.577.0

Preprints of Annual Meeting of The Ceramic Society of Japan, 2003

Session ID : 2L35

DOI https://doi.org/10.14853/pcersj.2003S.0.577.0

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Host: The Ceramic Society of Japan

Electrical Properties of PZT thin films with c-axis oriented seedeing layer by Electrical Field

*Hisao Suzuki, Sigeru Suzuki, Yusuke Hosi, Hiroshi Nakayama, Masato Uehara, Junichi Hojo

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Abstract

Lead zirconate titanate (PZT) thin films were deposited by spin coating on Pt/Ti/SiO2/Si substrate with chemical solution deposition(CSD) . We investigated the influence of applied electric field during annealing and seeding layer on orientation to control the film orientation. The resultant thin film by annealing with electric field exhibited higher degree of (001)- orientation than that of the film by normal annealing process.

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