Abstract
Lanthanum modified lead zirconate titanate [(Pb,La)(Zr,Ti)O3:PLZT] is famous for its high transparency and large electrooptic coefficient and is expected to be a candidate for the material of a photonic crystal which has new function. At first, we fabricated resist mold contains periodic array of square and circle holes Nb-doped (001)SrTiO3 substrate using EB lithography. After cast PLZT precursor into the mold, dried it, and polished unnecessary upper dry gel. After removed resist, there were periodic array of pillars of PLZT dry gel on the substrate. Fired them at 725°C in air, PLZT crystalline pillars grown epitaxially on the substrate were obtained. We report about cystalline, optical and electrical properties of them.
