17th Fall Meeting of The Ceramic Society of Japan
Session ID : 1P07
Conference information
Host: The Ceramic Society of Japan
Composition Dependence of Piezoelectric Property in Ba(Ti,Zr)O3 Thin Films Fabricated by Chemical Solution Deposition Process
*Kiyotaka Tanaka, Kazuyuki Suzuki, Tatsuo Kimura, Kaori Nishizawa, Takeshi Miki, Kazumi Kato
Author information
Keywords:
Ba(Ti1-xZrx)O3,
lead-free ferroelectrics,
chemical solution deposition process,
additional sintering,
piezoelectric constant d33
Details
