17th Fall Meeting of The Ceramic Society of Japan
Session ID : 1P08
Conference information
Host: The Ceramic Society of Japan
MOCVD growth of orientation controled PZT thick films prepared on Si substrates and their electrical properties
*Shoji Okamoto, Shintaro Yokoyama, Yoshihisa Honda, Gouji Asano, Hiroshi Funakubo
Author information
Keywords:
MOCVD,
PZT,
SrRuO3,
Orientation control,
Electrical-field-induced strain,
One-axis-orientation
Details
