Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
17th Fall Meeting of The Ceramic Society of Japan
Session ID : 3F08
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Host: The Ceramic Society of Japan

Micro-patterning of ferroelectric PZT thin films using Self-Assembled Monolayer
*Hitoshi Isshiki, Hisao Suzuki, Tatsuo Fujinami
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Keywords: lead zirconate titanate(PZT), sol-gel method, Self-Assembled Monolayer(SAM), micro-patterning
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[in Japanese]
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© The Ceramic Society of Japan 2004
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