Deposition of the thin films of the precursor of indium oxide from aqueous solutions containing In(III)-hydrogen peroxide

Abstract

Transparent and smooth thin films of indium hydroxide were deposited by soaking glass slides in aqueous solutions containing In(III) and hydrogen peroxide kept at certain temperatures. These films were converted to transparent indium oxide films by heat-treatments above 473K. The effects of the composition of the starting solutions and reaction temperature on the film deposition were investigated. Some properties of the resultant indium oxide thin films were characterized.