Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
17th Fall Meeting of The Ceramic Society of Japan
Session ID : 1A13
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Host: The Ceramic Society of Japan

Synthesis of a-CN films by ECR excitation helium plasma
*Shinya Takano, Kei-ichi Namiki, Shigeo Ohshio, Haruhiko Ito, Hidetoshi Saitoh
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Keywords: Amorphous carbon nitride, Hardness, chemical vapor deposition enhanced by electron cyclotron resonance plasma
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[in Japanese]
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© The Ceramic Society of Japan 2004
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