Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
17th Fall Meeting of The Ceramic Society of Japan
Session ID : 1H06
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Host: The Ceramic Society of Japan

Investigation of twin structure of epitaxially grown monoclinic ZrO2/Si thin films
*Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani
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Keywords: zirconia, dielectricity, transmission electron microscope, monoclinic, twin, Si
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[in Japanese]
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© The Ceramic Society of Japan 2004
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