Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Preprints of Annual Meeting of The Ceramic Society of Japan, 2004
Session ID : 1A27
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Host: The Ceramic Society of Japan

Small-size thermoelectric hydrogen sensor with microheater
*Woosuck Shin, Fabin Qiu, Kazuki Tajima, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama
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Keywords: SiGe, thermoelectric, sputtering, gas sensor
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[in Japanese]
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© The Ceramic Society of Japan 2004
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