Preprints of Annual Meeting of The Ceramic Society of Japan, 2004
Session ID : 1A28
Conference information
Host: The Ceramic Society of Japan
Micromechanical fabrication of thermoelectric hydrogen sensor
*Kazuki Tajima, Woosuck Shin, Fabin Qiu, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama
Author information
Keywords:
Thermoelectric material,
Hydrogen sensor,
Micro Electromechanical Systems,
Microfabrication,
SiGe
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