Relationship between residual species and microstructure in the chemical-vapor deposited oxide films

Abstract

To be high purity is often required for the oxide films deposited by the chemical vapor deposition technique due to effect of residual impurity on the morphology and crystalinity of the films. This study reveals that desorpted species from the oxide film sample measured using thermal desorption spectroscopy under high vacuum conditions. The molecules H₂,H₂O,N₂ and CO₂ were detected at high temperature.The relationship between residual species and microstructure in the film will be discussed.