Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Preprints of Annual Meeting of The Ceramic Society of Japan, 2004
Session ID : 1C27
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Host: The Ceramic Society of Japan

Microfabrication of Zinc oxide surface by wet etching technique
*Kenji Takahashi, *Naoki Ohashi, Isao Sakaguchi, Shunichi Hishita, Hiroshi Funakubo, Hajime Haneda
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Keywords: Zinc oxide, Micro fabrication, Etching, lithography
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[in Japanese]
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© The Ceramic Society of Japan 2004
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