Y DOPANT ENGINEERED RF-SPUTTERED (Bax,Sr1-x)TiO3 THIN FILMS FOR GHz DECOUPLING APPLICATIONS

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

18th Fall Meeting of The Ceramic Society of Japan & 1st Asia-Oceania Ceramic Federation (AOCF) Conference

Session ID : 1H17

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Host: The Ceramic Society of Japan

Y DOPANT ENGINEERED RF-SPUTTERED (Bax,Sr1-x)TiO3 THIN FILMS FOR GHz DECOUPLING APPLICATIONS

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Keywords: sputtering, thin film, BST, GHz

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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