Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
18th Fall Meeting of The Ceramic Society of Japan & 1st Asia-Oceania Ceramic Federation (AOCF) Conference
Session ID : 1H19
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Host: The Ceramic Society of Japan

Preparation of Epitaxial (Ba,Sr)TiO3 Thin Film Capacitor on Si Substrate and its Dielectric Properties
*Akinori Higuchi, Naoki Wakiya, Nobuyasu Mizutani, Kazuo Shinozaki, Yuji Nishi
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Keywords: Si Substrate, (Ba,Sr)TiO3, epitaxial, Dielectric Properties
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[in Japanese]
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© The Ceramic Society of Japan 2005
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