Effects of negative ions on the deposition of the thin films of In2O3 precursor

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

18th Fall Meeting of The Ceramic Society of Japan & 1st Asia-Oceania Ceramic Federation (AOCF) Conference

Session ID : 1C22

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Host: The Ceramic Society of Japan

Effects of negative ions on the deposition of the thin films of In2O3 precursor

*YOICHI SAITO, HIDERO UNUMA

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Keywords: indium oxide, Thin films

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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