Abstract
Beta gallium oxide (β-Ga2O3) ceramics was reacted with alpha aluminum oxide (α-Al2O3) ceramics and zinc oxide (ZnO) ceramics. Energy dispersive X-ray spectroscopy (EDS) analysis revealed gradual distribution of Al, Zn and Ga around the boundary. In order to evaluate the microscopic domain of these reacted boundaries, the novel evaluation method was utilized. This evaluation method has combined cathodoluminescence (CL) and EDS, and it can analyze luminescence and elemental composition with simultaneously. The boundaries among these materials showed various emissions from visible to deep ultraviolet, and these emissions were strongly correlated to elemental composition of the samples.