Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
19th Fall Meeting of The Ceramic Society of Japan
Session ID : 2H18
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Host: The Ceramic Society of Japan

High speed deposition of SiO2 films by laser chemical vapor deposition and their microstructures
*Jun Endo, Teiichi Kimura, Takashi Goto
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Keywords: Laser CVD, SiO2, Deposition rate, Microstructure
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2006
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