Fabrication of CeO2 and TiO2 Films/Patterns by Ink-jet and Spray Deposition

Abstract

Ink-jet and spray technology have been successfully used to fabricate ceria and titania film/pattern on glass substrate at 2750C to 400oC. Precursor solution was ink-jetted or sprayed towards heated substrate. When droplets of the precursor solution hit the substrate, precursor started to decompose and nucleation & growth of the film occurred. X-ray diffraction (XRD) revealed the formed phases are crystallized and consisted of 10~20 nm size crystallites. Minimum width of the patterns that could be prepared by ink-jet deposition was 120 mm and thickness was about 420nm. Adhesion property of fabricated films to the substrate was also good.