Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 1H29
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Host: The Ceramic Society of Japan

Density of amorphous carbon films fabricated by micro-wave plasma CVD method
*Ryotaro Matsuo, Shinya Takano, Kei-ichi Namiki, Shigeo Ohshio, Junichi Nishino, Hidetoshi Saitoh
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Keywords: amorphous carbon, micro-wave plasma CVD, X-Ray Reflectivity, Density
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[in Japanese]
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© The Ceramic Society of Japan 2006
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