Downsize of alkoxy-derived HfO2 layer for improvement of dielectric properties of the Pt/(Y,Yb)MnO3/HfO2/Si structure

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

Annual Meeting of The Ceramic Society of Japan, 2006

Session ID : 2P020

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Host: The Ceramic Society of Japan

Downsize of alkoxy-derived HfO₂ layer for improvement of dielectric properties of the Pt/(Y,Yb)MnO₃/HfO₂/Si structure

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Abstract

[in Japanese]

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