Abstract
In this research, a new multi functional device combines these four functions, the shape- memory effect, the super-elasticity effect the piezoelectric effect and the pyroelectric effect, is developed by coating the PZT thin film of 20um to the surface of the NiTi wire by the chemical reaction by using the hydrothermal crystallization method. We succeeded in the detection of the displacement at a super-elastic deformation of this multi functional device from the piezoelectric effect of the PZT film on the surface. By combining each effects, the multifunctional device can be used for a self-sensing actuator or a rough and precision actuator.