Piezoelectric-Actuated 2D Micro-Optical Scanners and their Application to a Projection Display

Abstract

A MEMS 2D-optical scanner for laser projection display has been developed by using piezoelectric unimorph actuators of PZT film made by the ADRIP (arc discharge reactive ion plating) technique. Stable raster scan by combining resosnant motion for the fast horizontal axis and for the slow vertical axis has made it possible to project monotone bitmap animations. Furthermore, VGA resolution could be obtained by new meandering piezo-actuator for the vertical axis, which can provide large scan angle even with static operation.