Direct observation of dielectric permittivity distribution for dielectric device using microwave probe and improvemen of image quality by two dimensional Fourier transformations

Abstract

Reflection intensities for cross-section of multi-layer ceramic capacitors were measured at GHz region by using a non-contact microwave probe. The microwave probe was scanned perpendicular to the sample surface with distance of 0.2 mm and detected the reflection intensities that indicate dielectric constant of the sample. The dielectric mappings showed the inner dielectric and electrodes of cross-section of multi-layer ceramic capacitors. The noise reduction of dielectric mapping was carried out using Fourier analysis using discrete Fourier transformation. The Fourier transformed image showed a power distribution as a function of space frequency. Noise reduction was considered for the Fourier transformed images in the view of space frequency.