Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2007
Session ID : 1D17
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Host: The Ceramic Society of Japan

Reaction analysis of CVD-Y2O3 films under consideration of absolute density
*Shinnosuke Kawaguchi, Takuya Mesaki, Shigeo Ohshio, Junichi Nishino, Hidetoshi Saitoh
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Keywords: Yttrium oxide, CVD, activation energy, frequency factor, density
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[in Japanese]
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© The Ceramic Society of Japan 2007
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