Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2007
Session ID : 1D18
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Host: The Ceramic Society of Japan

Primary factors for deposition rate of Y2O3 films during film deposition process using CVD
*Shinnosuke Kawaguchi, Shigeo Ohshio, junichi Nishino, Hidetoshi Saitoh
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Keywords: Yttrium oxide, CVD, activation energy, frequency factor
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[in Japanese]
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© The Ceramic Society of Japan 2007
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