Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2007
Session ID : 1D19
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Host: The Ceramic Society of Japan

Plasma resistance of dense yttrium oxide film prepared by aerosol deposition process
*Junichi Iwasawa, Ryoichi Nishimizu, Akihiko Matsumura, Masahiro Tokita, Masakatsu Kiyohara, Keizo Uematsu
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Keywords: Aerosol Deposition, Yttrium Oxide Film, Plasama Resistance, Transparency, Eroded Depth
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[in Japanese]
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© The Ceramic Society of Japan 2007
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