Application of Ceramic Film to Electrostatic Chucks Prepared by Aerosol Deposition Process

Abstract

In Aerosol Deposition Process (AD), a ceramic film around 1-100 microns thickness is formed directly onto substrate by emitting ceramic micro powder jet in room temperature. Recently, AD Y₂O₃ film is known to have excellent electrical and mechanical properties. In this study, the AD Y₂O₃ film was applied to the dielectric layer of electrostatic chuck (ESC). ESC is currently utilized for adsorptive immobilization of semiconductors, but it hardly adsorbs insulators. By arranging the AD Y₂O₃ dielectric layer on dye-pole with fine pattern, ESC samples were obtained which adsorbed even insulators very well with low voltage in room temperature.