Host: The Ceramic Society of Japan
ZnO thin films were prepared by electrochemical deposition method on Au electrode with constant potential (C.P.) and constant current conditions. The working electrode was irradiated with ultraviolet (UV) light during a deposition. The electrolysis current in C.P. condition was increased by UV irradiation, which is probably caused by photo-carrier generation in the deposited ZnO layer. The film thickness of a film with UV was larger than that grown in dark, because of shorter deposition term and lesser re-solution during a deposition caused by the larger electrolysis current. The edges of hexagonal grains grown under irradiation of UV were sharper than that in the dark.
