Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2008
Session ID : 3C07
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Host: The Ceramic Society of Japan

Preparation of Al2O3 thin films by rf magnetron sputtering
Takeshi Kitayama, Naonori Sakamoto, *Naoki Wakiya, Kazuo Shinozaki, Hisao Suzuki
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Keywords: alumina, thin film, sputtering, polytype
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[in Japanese]
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© The Ceramic Society of Japan 2008
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