Preparation of c-axis-oriented YBa₂Cu₃O_7-x film by laser chemical vapor deposition

Abstract

YBa₂Cu₃O_7-x (YBCO) films were prepared by laser chemical vapor deposition (LCVD) using Y(DPM)₃, Ba(DPM)₂ / Ba(TMOD)₂ and Cu(DPM)₂ as the precursors. A continuous wave Nd:YAG laser with a high power output of 200 W was employed, and a large laser spot of 20 mm in diameter was irradiated on Al₂O₃ substrate. YBCO films in a single phase were obtained. The YBCO films had an appreciable c-axis orientation, consisting of rectangular grains about 30 um in size. The highest deposition rate was 100 um / h, which was much higher than that of deposited by MOCVD (usually 0.1-1 um / h).